Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1998-08-07
1999-09-07
Nguyen, Kiet T.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250398, H01J 3730
Patent
active
059490780
ABSTRACT:
An electron gun for emitting an electron beam traveling along a beam axis includes a cathode having a tip, the tip having substantially a circular conic shape and a tip surface substantially at the beam axis, the cathode being applied with a first voltage, an anode having a first aperture substantially on the beam axis and being applied with a second voltage higher than the first voltage, a control electrode having a second aperture substantially on the beam axis and being applied with a voltage lower that the first voltage to control a current of the cathode, the second aperture being larger than the tip surface, a guide electrode having a third aperture substantially on the beam axis, being arranged between the cathode and the anode, and being applied with a voltage higher than the first voltage and lower than the second voltage, the third aperture being smaller than the tip surface, and a lens electrode having a fourth aperture substantially on the beam axis, being arranged between the guide electrode and the anode, and being applied with a voltage lower than the first voltage to form a cross-over image of the electron beam, the fourth aperture being larger than the third aperture.
REFERENCES:
patent: 3614520 (1971-10-01), Coleman
patent: 4926055 (1990-05-01), Miyokowa
patent: 5350920 (1994-09-01), Fukuyama et al.
patent: 5650628 (1997-07-01), Gordon et al.
Abe Tomohiko
Kudoh Kenj
Ooaeh Yoshihisa
Takahata Kouzi
Yamada Akio
Fujitsu Limited
Nguyen Kiet T.
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