4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Yoshihiko Nagata

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Film-forming on substrate by sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Frame-supported pellicle for dustproof protection of photomask

Stock material or miscellaneous articles – Display in frame or transparent casing; or diorama including... – Peripheral enclosure or frame
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Frame-supported pellicle for dustproof protection of photomask

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
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Frame-supported pellicle for dustproof protection of photomask

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Frame-supported pellicle for dustproof protection of photomask i

Stock material or miscellaneous articles – Display in frame or transparent casing; or diorama including... – Peripheral enclosure or frame
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Profile ID: LFUS-PAI-P-160309

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