4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Yoichi Okita

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FeRam semiconductor device with improved contact plug structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method for fabricating ferroelectric capacitor

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
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Method of manufacturing the FeRAM semiconductor device with...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Plasma etching method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Profile ID: LFUS-PAI-P-2332766

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