4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Yinan Chen

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Apparatus for carrying substrates processed in an etching proces

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Isolation structure for trench capacitors and fabrication...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Method and composite hard mask for forming deep trenches in...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for eliminating inverse narrow width effects in the...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Method for fabricating a DRAM capacitor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Profile ID: LFUS-PAI-P-200618

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