4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Electrical characteristic sensed

Yan Ye

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Apparatus and method for controlling the ratio of reactive...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Apparatus and method for shielding a dielectric member to...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Apparatus and method to confine plasma and reduce flow...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
Reexamination Certificate

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Apparatus for marking a substrate using ionized gas

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Apparatus for measuring plasma characteristics within a semicond

Radiant energy – With charged particle beam deflection or focussing – With detector
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Profile ID: LFUS-PAI-P-169881

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