4. Thermal measuring and testing
  5. Temperature measurement
  6. In spaced noncontact relationship to specimen

Wayne Glenn Renken

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Integrated process condition sensing wafer and data analysis...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Integrated process condition sensing wafer and data analysis...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Integrated process condition sensing wafer and data analysis...

Data processing: measuring – calibrating – or testing – Testing system – Including specific communication means
Reexamination Certificate

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Integrated process condition sensing wafer and data analysis...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Integrated wafer temperature sensors

Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1814374

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