Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2006-10-27
2010-12-21
Hollington, Jermele M (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
Reexamination Certificate
active
07855549
ABSTRACT:
A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. Process conditions may be measured with little disturbance to the production environment. Data may be transferred from a process condition-measuring device to a user with little or no human intervention.
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Gordon Roy
Jensen Earl M.
Paquette Brian
Renken Wayne Glenn
Sun Mei H.
Hollington Jermele M
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
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