Integrated process condition sensing wafer and data analysis...

Details Integrated process condition sensing wafer and data analysis... Integrated process condition sensing wafer and data analysis...

2006-12-12

2006-12-12

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Testing system

Including specific communication means

C702S130000, C702S127000, C700S245000

Reexamination Certificate

active

07149643

ABSTRACT:
A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. A process condition measuring device surveys conditions in a target environment and records them in a memory for later transmission or downloading.

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