Integrated process condition sensing wafer and data analysis...

Details Integrated process condition sensing wafer and data analysis... Integrated process condition sensing wafer and data analysis...

2006-12-19

2006-12-19

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

07151366

ABSTRACT:
A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. Process conditions may be measured with little disturbance to the production environment. Data may be transferred from a process condition measuring device to a user with little or no human intervention.

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