4. Semiconductor device manufacturing: process
  5. Bonding of plural semiconductor substrates

Walter H Swanson

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Chemical mechanical polishing method with inspection pre and...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Dicing/die bonding film

Stock material or miscellaneous articles – Structurally defined web or sheet – Continuous and nonuniform or irregular surface on layer or...
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Electron mobility enhancement for MOS devices with nitrided...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Etch depth control for dual damascene fabrication process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Fabricating method for crack stop structure enhancement of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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