4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Venkatesh Gopinath

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Hard mask removal

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Reexamination Certificate

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High k gate insulator removal

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Modular growth of multiple gate oxides

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Polysilicon gate salicidation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2561457

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