4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Veljko Milanovic

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Fast and high-precision 3D tracking and position measurement...

Optics: measuring and testing – Position or displacement
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Gimbal-less micro-electro-mechanical-system tip-tilt and...

Optical waveguides – With optical coupler – Switch
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Gimbal-less micro-electro-mechanical-system tip-tilt and...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Maskless method for fabricating a low-loss microwave power senso

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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MEMS device control with filtered voltage signal shaping

Optical waveguides – With optical coupler – Switch
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Profile ID: LFUS-PAI-P-810133

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