Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate
2007-11-09
2011-10-25
Norton, Nadine G (Department: 1713)
Etching a substrate: processes
Etching of semiconductor material to produce an article...
C216S041000, C216S048000, C385S014000, C385S016000, C385S017000, C385S018000
Reexamination Certificate
active
08043513
ABSTRACT:
Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels. The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.
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U.S. Appl. No. 11/003,271 entitled “Gimbal-less Micro-Electro-Mechanical-System Tip-Tilt and Tip-Tilt-Piston Actuators and a Method for Forming the Same”to Veljko Milanovic, filed Dec. 2, 2004.
Matus Gabriel A.
Milanovic Veljko
Adriatic Research Institute
Dahimene Mahmoud
Isenberg Joshua D.
JDI Patent
Norton Nadine G
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