4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Varian Semiconductor Equipment Associates, Inc.

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Ion beam measurement apparatus and method

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Methods and apparatus for ion beam angle measurement in two...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Methods and systems for optimizing ion implantation...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Methods for forming thin film layers by simultaneous doping...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Uniformity control multiple tilt axes, rotating wafer and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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