4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Valentin N. Todorow

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Cathode liner with wafer edge gas injection in a plasma...

Coating apparatus – Gas or vapor deposition – With treating means
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Dual plasma source process using a variable frequency...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Gas flow equalizer plate suitable for use in a substrate...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Method and apparatus to monitor electrical states at a...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Method to control uniformity using tri-zone showerhead

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2228927

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