Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate
2008-02-28
2011-12-13
Zervigon, Rudy (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With measuring, sensing, detection or process control means
C156S345510, C118S715000
Reexamination Certificate
active
08075728
ABSTRACT:
A flow equalizer plate is provided for use in a substrate process chamber. The flow equalizer plate has an annular shape with a flow obstructing inner region, and a perforated outer region that permits the passage of a processing gas, but retains specific elements in the processing gas, such as active radicals or ions. The inner and outer regions have varying radial widths so as to balance a flow of processing gas over a surface of a substrate. In certain embodiments, the flow equalizer plate may be utilized to correct chamber flow asymmetries due to a lateral offset of an exhaust port relative to a center line of a substrate support between the process volume and the exhaust port.
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PCT International Search Report for PCT/US2009/034533, dated Sep. 1, 2009.
Balakrishna Ajit
Nguyen Andrew
Rauf Shahid
Todorow Valentin N.
Willwerth Michael D.
Applied Materials Inc.
Patterson & Sheridan L.L.P.
Zervigon Rudy
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