4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Vahid Vahedi

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Applications of a semi-empirical, physically based, profile...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Edge gas injection for critical dimension uniformity...

Semiconductor device manufacturing: process – Chemical etching
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Enhanced process and profile simulator algorithms

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Enhanced process and profile simulator algorithms

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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In-situ cleaning of a polymer coated plasma processing chamber

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Profile ID: LFUS-PAI-P-577294

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