4. Radiant energy
  5. Irradiation of objects or material

Vadim Yevgenyevich Banine

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Anti-reflection coating for an EUV mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Apparatus including a radiation source, a filter system for...

X-ray or gamma ray systems or devices – Beam control – Filter
Reexamination Certificate

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Apparatus with plasma radiation source and method of forming...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Controlling the flow through the collector during cleaning

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electromagnetic radiation source, lithographic apparatus,...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2179209

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