X-ray or gamma ray systems or devices – Beam control – Filter
Reexamination Certificate
2006-09-12
2006-09-12
Nguyen, Kiet T. (Department: 2881)
X-ray or gamma ray systems or devices
Beam control
Filter
C378S158000, C250S505100
Reexamination Certificate
active
07106832
ABSTRACT:
Particles emitted by a radiation source, and moving from the radiation source towards a processing system for processing the radiation from the radiation source, are filtered out of radiation propagating through a predetermined cross section of the radiation as emitted by the radiation source by a filter system. The filter system includes a plurality of foils and a transporter for transporting the foils along a trajectory which extends within the beam so that the foils intercept the particles within the beam. The transporter is arranged to transport the foils by a substantially translatory movement of the foils along at least a part of the trajectory.
REFERENCES:
patent: 6359969 (2002-03-01), Shmaenok
patent: 6882704 (2005-04-01), Schriever et al.
patent: 2003/0020890 (2003-01-01), Ogushi et al.
Bakker Levinus Pieter
Banine Vadim Yevgenyevich
Klunder Derk Jan Wilfred
Van Herpen Maarten Marinus Johannes Wilhelmus
ASML Netherlands B.V.
Nguyen Kiet T.
Pillsbury Winthrop Shaw & Pittman LLP
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