4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Uwe Paul Schroeder

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‘Via first’ dual damascene process for copper...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Effective assist pattern for nested and isolated contacts

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Liquid crystalline light-modulating device

Compositions – Liquid crystal compositions
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Lithographic mask, and method for covering a mask layer

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Lithography masks and methods

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-2139310

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