Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2004-09-28
2008-07-29
Huff, Mark F. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S271100, C430S273100, C359S507000
Reexamination Certificate
active
07405024
ABSTRACT:
A lithographic mask having a mask substrate (3) and a patterned mask layer (4) which includes mask structures (5) and can be transferred by lithography to a further substrate is disclosed. With masks of this type, it is customary for a protective layer to be provided in the form of a membrane positioned at a distance from the mask layer (4), in order to keep impurity particles or other impurities away from the focal plane of the mask layer (4). According to the invention, the protective layer (6) is applied in liquid form directly to the mask structures (5) and fills up spaces between the mask structures (4). Then, the protective layer (6), while it is still in the liquid state, is covered with a plane-parallel plate. The continuously dense protective layer (6) which is formed in accordance with the invention is even more reliable in preventing impurity particles or impurities (20) from penetrating into spacers between the structures (5) of the mask layer (4). The impurity particles or impurities (20) can only be deposited on the outer side (16) of the protective layer (6), at a still greater distance from the focal plane.
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Speight, James G. Lange's Handbook of Chemistry (16th Edition). McGraw-Hill.□□Online version available at:□□http://www.knovel.com/knovel2/Toc.jsp?BookID=1347&VerticalID=0.
Maex, Karen; Van Rossum, Marc Properties of Metal Silicides. (pp. 242-243). Institution of Engineering and Technology.□□Online version available at:□□http://www.knovel.com/knovel2/Toc.jsp?BookID=1134&VerticalID=0.
Broermann Oliver
Schroeder Uwe Paul
Huff Mark F.
Infineon - Technologies AG
Jelsma Jonathan
Slater & Matsil L.L.P.
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