4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Tung & Assoc.

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Amorphizing ion implant method for forming polysilicon...

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure
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Barrier metal re-distribution process for resistivity reduction

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Calibration cassette pod for robot teaching and method of using

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
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Calibration standards for dopants/impurities in silicon and...

Semiconductor device manufacturing: process – With measuring or testing
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Detection of lens anti-reflective coating decay by undesired...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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