Calibration cassette pod for robot teaching and method of using

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling

Reexamination Certificate

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Details

C414S749300, C414S416080, C414S618000, C414S729000

Reexamination Certificate

active

07054713

ABSTRACT:
A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top panel, a bottom panel, two side panels and a front panel to enclose a cavity therein. A first plurality of ribs is formed on an inside surface of the cassette pod body, each having a predetermined depth sufficient to support an edge portion of a wafer. An optical detector housing is mounted on an opening in the front panel and is adapted for receiving an optical detector therein. An optical detector that includes a light emission source and a photo diode receiver for determining the position of the edge portion of the wafer is mounted in the optical detector housing.

REFERENCES:
patent: 4819167 (1989-04-01), Cheng et al.
patent: 5783834 (1998-07-01), Shatas
patent: 5981966 (1999-11-01), Honma
patent: 6300644 (2001-10-01), Beckhart et al.

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