Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Corporate Assignee
active
No affiliations
Austenitic stainless steel substrate for magnetic-recording medi
Circularly symmetric sputtering apparatus with hollow-cathode pl
Circularly symmetric, large-area, high-deposition-rate sputterin
Coating of metal substrate for magnetic recording medium
Coldwall hollow-cathode plasma device for support of gas dischar
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