4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Plasma generating

Tsang-Jiuh Wu

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Damascene structure with high moisture-resistant oxide and...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Dual damascene process without an etch stop layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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In-situ discharge to avoid arcing during plasma etch processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Large area microwave plasma generator

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2102291

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