4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Trikon Holdings Limited

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Delivery of liquid precursors to semiconductor processing...

Fluent material handling – with receiver or receiver coacting mea – Processes
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Depositing a tantalum film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition apparatus

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
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Deposition methods and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Dielectric layer for a semiconductor device and method of...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
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Profile ID: LFUS-PAI-P-2529731

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