4. Optics: measuring and testing
  5. Photometers
  6. Photoelectric

Toshio Matsuura

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Alignment apparatus

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Alignment apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Distance measuring apparatus using multiple switched interferome

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Exposure apparatus for production of integrated circuit

Optics: measuring and testing – Photometers – Photoelectric
Patent

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Profile ID: LFUS-PAI-P-234038

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