Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-12-15
1996-06-04
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, G01B 902
Patent
active
055238416
ABSTRACT:
A plurality of interference length (distance) measuring means which are opposed to a movable mirror are aligned in the direction in which said movable mirror moves at an interval narrower than the length of the mirror surface. These interference length measuring means are switched according to movement of the movable mirror. Thus, the range within which distances from the mirror surface are measured can be made wider than the length of the mirror surface of the movable mirror.
REFERENCES:
patent: 4666273 (1987-05-01), Shimizu et al.
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4998789 (1991-03-01), Ishizuka et al.
patent: 5114234 (1992-05-01), Otsuka et al.
Matsuura Toshio
Nara Kei
Nikon Corporation
Turner Samuel A.
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