Distance measuring apparatus using multiple switched interferome

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356363, G01B 902

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active

055238416

ABSTRACT:
A plurality of interference length (distance) measuring means which are opposed to a movable mirror are aligned in the direction in which said movable mirror moves at an interval narrower than the length of the mirror surface. These interference length measuring means are switched according to movement of the movable mirror. Thus, the range within which distances from the mirror surface are measured can be made wider than the length of the mirror surface of the movable mirror.

REFERENCES:
patent: 4666273 (1987-05-01), Shimizu et al.
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4998789 (1991-03-01), Ishizuka et al.
patent: 5114234 (1992-05-01), Otsuka et al.

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