Toru Takayama

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Apparatus for microwave processing in a magnetic field

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Apparatus for microwave processing in a magnetic field

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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CVD apparatus

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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CVD apparatus

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
Patent

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CVD apparatus

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-79011

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