4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Tomokazu Kozakai

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Charged particle beam irradiation method and charged...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged particle beam scan and irradiation method, charged...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged particle processing for forming pattern boundaries...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Focused ion beam processing method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion beam processing method

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Profile ID: LFUS-PAI-P-2263595

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