Charged particle beam scan and irradiation method, charged...

Details Charged particle beam scan and irradiation method, charged... Charged particle beam scan and irradiation method, charged...

2006-10-25

2009-02-03

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492200, C250S3960ML, C250S398000, C250S310000

Reexamination Certificate

active

07485880

ABSTRACT:
After a scan area for observing or processing a mask is set, a computer of the charged particle beam apparatus determines a plurality of scan lines in the scan area by the following steps of: setting a scan line along the outer circumference of the scan area; determining a scan line inside and along the thus set scan line; determining a scan line inside and along the thus determined scan line; and repeating the step of determining a scan line. After the scan lines are determined, the computer controls a scanning circuit to apply an ion beam to the scan lines while thinning out scan lines and/or pixels.

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