Apparatus and method for washing substrates

Details Apparatus and method for washing substrates Apparatus and method for washing substrates

1993-11-19

1996-03-12

Silbaugh, Jan H.

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 18, 134902, 15 211, 15 881, 15 882, B08B 704, B08B 1100

Patent

active

054982944

ABSTRACT:
A substrates-cleaning apparatus including a first unit provided with a scrubber for scrubbing a single side of a substrate, a second unit provided with a turning mechanism for turning the substrate upside down or vice versa, and a carrier robot for carrying the substrate between the first and the second unit.

REFERENCES:
patent: 5081733 (1992-01-01), Kudo
patent: 5092011 (1992-03-01), Gommori et al.
patent: 5144711 (1992-09-01), Gill, Jr.
patent: 5278821 (1994-01-01), Kawamura et al.
patent: 5282289 (1994-02-01), Hasegawa et al.
patent: 5345639 (1994-09-01), Tanoue et al.

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