Apparatus and method using optical sensors recessed in channel w

Details Apparatus and method using optical sensors recessed in channel w Apparatus and method using optical sensors recessed in channel w

1993-10-20

1995-04-11

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

414936, G01N 2186, G01V 904

Patent

active

054060923

ABSTRACT:
A semiconductor wafer-detecting apparatus is provided with a main support body formed of synthetic resin. A pair of substantially-parallel longitudinal channels and a plurality of substantially-parallel transverse channels are formed in the main support body. The longitudinal channels are located away from each other by a predetermined distance, and the transverse channels are arranged at intervals corresponding to the intervals at which wafers are arranged. Between the adjacent transverse channels, a plurality of pairs of holding portions are defined such that each pair is associated with the longitudinal channels. A pair of light-emitting elements and a pair of light-receiving elements are alternately arranged with reference to the holding portions. The light-emitting elements of each pair have their light-emitting faces oriented in opposite directions; likewise, the light-receiving elements of each pair have their light-receiving faces oriented in opposite directions. The light-emitting elements of each pair and associated light-receiving elements jointly constitute respective optical sensors. The presence or absence of a wafer is determined by detecting whether or not light is shielded between the light-emitting and light-receiving elements of each optical sensor.

REFERENCES:
patent: 5183378 (1993-02-01), Asano et al.
patent: 5206627 (1993-04-01), Kato
patent: 5225691 (1993-07-01), Powers et al.
patent: 5266812 (1993-11-01), Mokuo
patent: 5327921 (1994-07-01), Mokuo et al.

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