4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Tokuhisa Ohiwa

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Dry etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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Etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fabrication process using a multi-layer antireflective layer

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Fabrication process using a thin resist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Gas recirculation flow control method and apparatus for use...

Fluid handling – Processes – With control of flow by a condition or characteristic of a...
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Profile ID: LFUS-PAI-P-512090

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