4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Todd P. Lukanc

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Bright field image reversal for contact hole patterning

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Conductive material adhesion enhancement in damascene process fo

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Connection structures for integrated circuits and processes...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Dark field image reversal for gate or line patterning

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Device and method for determining an illumination intensity...

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Profile ID: LFUS-PAI-P-207226

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