Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Bond pad structure having dummy plugs and/or patterns formed...
C x H y sacrificial layer for cu/low-k interconnects
C x H y sacrificial layer for cu/low-k interconnects
Composite etching stop in semiconductor process integration
Composite etching stop in semiconductor process integration
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