4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With measuring, sensing, detection or process control means

Thomas Hamelin

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Gas distribution system for a post-etch treatment system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Method and apparatus for efficient temperature control using...

Electricity: electrical systems and devices – Housing or mounting assemblies with diverse electrical... – For electronic systems and devices
Reexamination Certificate

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Method and apparatus for thermally insulating adjacent...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Post-etch treatment system for removing residue on a substrate

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
Reexamination Certificate

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Processing system and method for chemically treating a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2205610

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