Method and apparatus for efficient temperature control using...

Details Method and apparatus for efficient temperature control using... Method and apparatus for efficient temperature control using...

2006-01-31

2006-01-31

Vortman, Anatoly (Department: 2835)

Electricity: electrical systems and devices

Housing or mounting assemblies with diverse electrical...

For electronic systems and devices

C361S709000, C361S710000, C361S711000, C361S702000, C257S714000

Reexamination Certificate

active

06992892

ABSTRACT:
A substrate holder for supporting a substrate, including an exterior supporting surface, a cooling component, a heating component positioned adjacent to the supporting surface and between the supporting surface and the cooling component, and a contact volume positioned between the heating component and the cooling component, and formed by a first internal surface and a second internal surface. The thermal conductivity between the heating component and the cooling component is increased when the contact volume is provided with a fluid.

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