Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2007-05-08
2007-05-08
Moore, Karla (Department: 1763)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C118S733000, C156S345310, C156S345320, C414S935000, C414S939000, C034S209000, C034S242000, C432S242000, C204S298230, C204S298350
Reexamination Certificate
active
10705397
ABSTRACT:
A dual chamber apparatus including a first chamber and a second chamber which is configured to be coupled to the first chamber at an interface. Each of the first chamber and the second chamber has a transfer opening located at the interface. An insulating plate is located on one of the first chamber and the second chamber at the interface and is configured to have a low thermal conductivity such that the first chamber and the second chamber can be independently controlled at different temperatures when the first chamber and the second chamber are coupled together. Additionally, the apparatus may include an alignment device and/or a fastening device for fastening the first chamber to the second chamber. In embodiments, the insulating plate may be constructed of Teflon. Further, the first chamber may be a chemical oxide removal treatment chamber and the second chamber may be a heat treatment chamber.
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Hamelin Thomas
Wallace Jay
Moore Karla
Pillsbury Winthrop Shaw & Pittman LLP
Tokyo Electron Limited
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