4. Abrading
  5. Precision device or process - or with condition responsive...
  6. Controlling temperature

Thomas Buschhardt

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Method and device for polishing semiconductor wafers

Abrading – Precision device or process - or with condition responsive... – With indicating
Patent

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Method for machining a semiconductor wafer on both sides in...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method for the wet-chemical treatment of a semiconductor wafer

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Process and device for polishing semiconductor wafers

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Patent

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Process for cleaning a semiconductor wafer using a cleaning...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Profile ID: LFUS-PAI-P-879923

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