4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Thanh N. Pham

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Deposition of stable dielectric films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Deposition process for high aspect ratio trenches

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Gap filling with a composite layer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Gas delivery system for semiconductor processing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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In-situ-etch-assisted HDP deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2348618

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