4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Tetsuya Matsutani

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Contact hole formation method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Manufacturing method for an electronic device, and the...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Resistance defect assessment device, resistance defect...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2429971

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