4. Electrical transmission or interconnection systems
  5. Switching systems
  6. Condition responsive

Tetsuo Kitabayashi

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Dielectric ceramics for electrostatic chucks and method of makin

Compositions: ceramic – Ceramic compositions – Refractory
Patent

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Electrostastic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Profile ID: LFUS-PAI-P-648569

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