Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

1993-03-22

1995-01-24

Gaffin, Jeffrey A.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, 269 8, H02N 1300

Patent

active

053846826

ABSTRACT:
An electrostatic chuck has a substrate, an insulating layer disposed on the substrate for attracting a workpiece thereto, and an electrode interposed between the substrate and the insulating layer. The insulating layer having a volume resistivity .rho.(.OMEGA.m), a dielectric constant .epsilon..sub.r, and a thickness d (m), and being spaced from the workpiece which is attracted thereto by a gap having a distance .delta.(m). The volume resistivity .rho., the dielectric constant .epsilon..sub.r, the thickness d, and the distance .delta. satisfy the following relationship:

REFERENCES:
patent: 4184188 (1980-01-01), Briglia
patent: 5151845 (1992-09-01), Watanabe et al.
patent: 5166856 (1992-11-01), Liporace et al.

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