4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Terry G. Sparks

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Conductive via formation utilizing electroplating

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for forming a passivation layer for air gap formation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Method of making a contact on a backside of a die

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Process for forming a semiconductor device and a process for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Process for forming a semiconductor device having an...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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