4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Takenori Hirose

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Method and apparatus for inspecting a pattern shape

Dynamic information storage or retrieval – Condition indicating – monitoring – or testing
Reexamination Certificate

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Method and apparatus for managing surface image of thin film...

Image analysis – Applications – Manufacturing or product inspection
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Method and apparatus for measuring depth of holes formed on...

Geometrical instruments – Distance measuring – Single contact with a work engaging support
Reexamination Certificate

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Method and apparatus for measuring thickness of thin film...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Method and apparatus for measuring thickness of thin film...

Optics: measuring and testing – Dimension – Thickness
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Profile ID: LFUS-PAI-P-2325620

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