Method and apparatus for managing surface image of thin film...

Details Method and apparatus for managing surface image of thin film... Method and apparatus for managing surface image of thin film...

2006-01-17

2006-01-17

Ahmed, Samir (Department: 2623)

Image analysis

Applications

Manufacturing or product inspection

C348S126000, C700S110000

Reexamination Certificate

active

06987874

ABSTRACT:
A tool useful for defect analysis can be provided in which a surface image of the whole single die is detected, and the surface image of the whole detected die, information of defect position and a magnified image of a defect region are displayed together at a time so that the operator can intuitively grasp what circuit pattern the defect or the like is located on within a die.

REFERENCES:
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patent: 6684379 (2004-01-01), Skoll et al.
patent: 2003/0002580 (2003-01-01), Miura et al.
patent: 2003/0006364 (2003-01-01), Katzir et al.
patent: 3-138505 (1991-06-01), None
patent: 2000-009437 (2000-01-01), None
patent: 2000-285235 (2000-10-01), None
patent: 2000-294608 (2000-10-01), None

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