Geometrical instruments – Distance measuring – Single contact with a work engaging support
Reexamination Certificate
2007-07-17
2007-07-17
Smith, Richard (Department: 2859)
Geometrical instruments
Distance measuring
Single contact with a work engaging support
C033S546000, C033S554000, C702S167000
Reexamination Certificate
active
10986878
ABSTRACT:
A method an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning, with a stylus, the surface of the sample in which the hole patterns are formed by etching. The depths of the plurality of hole patterns are measured by scanning, with the stylus, bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information that has been acquired. Information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns.
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Hirose Takenori
Kembo Yukio
Morimoto Takafumi
Nagano Yoshiyuki
Watanabe Masahiro
Antonelli, Terry Stout & Kraus, LLP.
Hitachi Kenki Fine Tech Co., Ltd.
Reis Travis
Smith Richard
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