4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Takashi Udagawa

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AlGaInP light-emitting diode

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With heterojunction
Reexamination Certificate

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Boron phosphide-based semiconductor device and production...

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With particular dopant material
Reexamination Certificate

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Boron phosphide-based semiconductor device and production...

Stock material or miscellaneous articles – Composite – Of b – n – p – s – or metal-containing material
Reexamination Certificate

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Boron phosphide-based semiconductor device, production...

Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate

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Boron phosphide-based semiconductor layer and vapor phase...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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