4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Tai-Peng Lee

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Control of air gap position in a dielectric layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Control of air gap position in a dielectric layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Low temperature nitridation of amorphous high-K metal-oxide...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of making a silicon nitride film that is transmissive...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Reduced thickness variation in a material layer deposited in...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Profile ID: LFUS-PAI-P-2402902

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